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19" Cylindrical PLD system with two target
carousels
Base pressure better 5x-19 torr
(Option for 5x-10 torr)
3" wafer substrate heater up to 1200 degree C
@ ambient oxygen (wafer size up to 6")
higher temperature on request
6x1" or 3x2" target carousel with optional
mask
Optional for high pressure RHEED, k-cells,
sputtering gun, etc.
