C&K Scientific and Technological Instruments Co.,Ltd. -- UHV Sputtering system
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C&K Scientific and Technological Instruments Co.,Ltd.

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UHV
 

UHV Sputtering system

Base pressure better than 10-10 torr
Six 2" reactive DC/RF sputtering guns
3" Substrate heater up to 1000 degree C
 

 

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